El polvo de carburo de silicio (SiC) verde, utilizado en el pulido de obleas de semiconductores, es un material clave. Se utiliza ampliamente en procesos de pulido de precisión gracias a su alta dureza y excelente estabilidad química y térmica.
1. Características del carburo de silicio verde
—Alta dureza (dureza Mohs 9.2): solo superada por el diamante y el nitruro de boro cúbico, adecuada para procesar materiales duros (como silicio, obleas de carburo de silicio).
—Inercia química: no reacciona con ácidos y álcalis a temperatura ambiente para evitar la contaminación de la superficie de la oblea.
—Estabilidad térmica: aún puede mantener el rendimiento a altas temperaturas, adecuado para pulido de alta velocidad.
–Forma de partícula afilada: proporciona una capacidad de corte eficiente, pero es necesario controlar la uniformidad de las partículas para evitar rayones.
ANÁLISIS QUÍMICO TÍPICO | |
Sic | ≥99,05% |
SiO2 | ≤0,20% |
F,Si | ≤0,03% |
Fe2O3 | ≤0,10% |
FC | ≤0,04% |
PROPIEDADES FÍSICAS TÍPICAS | |
Dureza: | Mohs: 9.5 |
Punto de fusión: | Sublimes a 2600 ℃ |
Temperatura máxima de servicio: | 1900℃ |
Peso específico: | 3,20-3,25 g/cm3 |
Densidad aparente (LPD): | 1,2-1,6 g/cm3 |
Color: | Verde |
Forma de la partícula: | Hexagonal |
2. Aplicación en el pulido de semiconductores
—Etapa de pulido grueso: se utiliza para eliminar defectos más grandes o rastros de procesamiento en la superficie de la oblea (como capas dañadas después de cortar y pulir).
—Pulido de obleas de carburo de silicio (SiC): el carburo de silicio verde coincide con la dureza de los materiales de las obleas de SiC para reducir el daño a la superficie.
—Aplicaciones auxiliares: se utiliza para pulir materiales duros y quebradizos como sustratos de zafiro y vidrio óptico.
3. Requisitos clave de calidad
—Distribución del tamaño de partículas: debe ser muy uniforme (como D50 1–5 μm) para evitar rayones causados por partículas grandes.
—Pureza: alta pureza (≥99,9%) para reducir la contaminación por impurezas metálicas (como Fe, Al).
—Morfología de la partícula: debe ser esférica o equiárea para reducir la rugosidad de la superficie.
—Suspensión: dispersión estable en el líquido de pulido para evitar la sedimentación.
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